Micro Nano Fabrication

Metrology Equipment

Optical Profilometer | Keyence VK-X3050

The Keyence VK-X3050 is a 3D surface profiler enabling non-contact measurement of surface features. The Keyence provides variable focus, laser scanning confocal, and white light interferometric imaging modes. 3D surface profiling as well as Surface roughness measurements are available.

Specifications

Variable focus imaging
Measurement range: 7 mm
Objectives: 5×, 10×, 20×, and 50×,
Vertical Resolution: 1 nm

Laser scanning confocal imaging
Measurement range: 7 mm
Laser wavelength: 661 nm
Objectives: 5×, 10×, 20×, and 50×
Vertical Resolution: 1 nm

White light interferometry
Measurement range: 7 mm
Interference objectives: 10× and 50×
Vertical Resolution: 0.01 nm
RMS Repeatability: 0.008 nm

SOP

IMSE contact

For additional information about the optical profilometer or to request training, please contact IMSE cleanroom staff.

Dr. Rajinder Deol (deolr@wustl.edu)
Dr. Edwin Carlen (carlen@wustl.edu)

Sylus Profilometer | KLA Tencor Alpha Step D-100

The KLA Tencor Alpha Step D-100 is a stylus-based surface profiler to measure step heights on surfaces. A stylus placed in contact with the substrate surface is dragged along the surface, and vertical deflection measures the change in step height.

SOP

IMSE contact

For additional information about the stylus profilometer or to request training, please contact IMSE cleanroom staff.

Dr. Rajinder Deol (deolr@wustl.edu)
Dr. Edwin Carlen (carlen@wustl.edu)

Spectroscopic Ellipsometer | J.A. Woollam α-SE

The J.A. Woollam alpha-SE is a benchtop ellipsometer enabling the measurement of optical properties and thin film thickness.

Specifications

380−900 nm spectral range
70° angle-of-incidence (straight-through configuration available)
Up to 200 mm sample size
CompleteEASE software
3 mm diameter beam (QTH lamp)

SOP

IMSE contact

For additional information about the ellipsometer or to request training, please contact IMSE cleanroom staff.

Dr. Rajinder Deol (deolr@wustl.edu)
Dr. Edwin Carlen (carlen@wustl.edu)

Optical Microscope (Class 100)

The Zeiss AX10 microscope provides optical microscope views of samples in either reflected or transmitted light modes.

Objectives: 5×, 10×, 20×, 50× and 100×
Capture software: TBD

IMSE contact

For additional information about the optical microscope or to request training, please contact IMSE cleanroom staff.

Dr. Rajinder Deol (deolr@wustl.edu)
Dr. Edwin Carlen (carlen@wustl.edu)

Optical Microscope (Class 1000)

The Zeiss Axioskop microscope provides optical microscope views of samples in reflected light mode.

Objectives: 5×, 10×, 20×, 50×, and 100×
Capture software: ToupView

IMSE contact

For additional information about the optical microscope or to request training, please contact IMSE cleanroom staff.

Dr. Rajinder Deol (deolr@wustl.edu)
Dr. Edwin Carlen (carlen@wustl.edu)

Optical Microscope (L27)

The Nikon microscope provides optical microscope views of samples in reflected light mode.

Objectives: 5×, 10×, 20×, 50×, and 100×

IMSE contact

For additional information about the optical microscope or to request training, please contact IMSE cleanroom staff.

Dr. Rajinder Deol (deolr@wustl.edu)
Dr. Edwin Carlen (carlen@wustl.edu)

Depth Gauge | Mitutoyo

The Mitutoyo depth gauge is used to measure wafer thickness with a vertical resolution of 10 microns.

IMSE contact

For additional information about the depth gauge or to request training, please contact IMSE cleanroom staff.

Dr. Rajinder Deol (deolr@wustl.edu)
Dr. Edwin Carlen (carlen@wustl.edu)