Wet Chemical Processing Equipment

The Acid Fume Hood is used for wet etching various thin films on different substrate materials including silicon and glass wafers. Training is required to use the Acid Hood station. Bringing chemicals into the cleanroom requires approval by IMSE Cleanroom staff.

SOP 

IMSE contact

For additional information about the acid hood or to request training, please contact IMSE cleanroom staff.
Dr. Rajinder Deol (deolr@wustl.edu)
Dr. Edwin Carlen (carlen@wustl.edu)

Chemicals supplied by IMSE

• Buffered Oxide Etch (5:1)
• Hydrofluoric Acid (48%)
• Aluminum Etchant Type D
• Chrome Etch 1020
• Gold Etchant
• Nitric Acid (70%)
• Sulfuric Acid (95%)
• Hydrochloric acid (37%)
• Hydrogen Peroxide
• Phosphoric Acid
• Acetic Acid
• Ferric Chloride

Etching/cleaning recipies

Piranha Clean: H2SO4:H2O2 3:1
RCA Clean: SC1 (H2O:NH4OH:H2O2 5:1:1), SC2 (H2O:HCL,H2O2 6:1:1), and HF dip
HF-HNO3:  H2O:HF(48%):HNO3 8:2:1

Solvent Fume Hoods 1 & 2 are typically used to process samples for photolithography and electron beam lithography. Hot plates and an ultrasonicator are included in the reservation.

• Spin coaters must be reserved separately on iLab
• Remover PG heating (≤ 60∘C)
• If you perform long lift-off experiments (after staff approval), please record actual usage time and mention lift-off in the comment. IMSE will only bill you for 30 min for lift-off experiments

SOP

IMSE contact

For additional information about the solvent hoods or to request training, please contact IMSE cleanroom staff.

Dr. Rajinder Deol (deolr@wustl.edu)
Dr. Edwin Carlen (carlen@wustl.edu)

The Acid Hood in room L27 can be used for most acids and wet etchants. 

SOP

IMSE contact

For additional information about the acid hood in room L27 or to request training, please contact IMSE cleanroom staff.

Dr. Rajinder Deol (deolr@wustl.edu)
Dr. Edwin Carlen (carlen@wustl.edu)

There are two Solvent Hoods in room L27 that can be used for processing samples using most solvents.

SOP

IMSE contact

For additional information about the solvent hoods in room L27 or to request training, please contact IMSE cleanroom staff.

Dr. Rajinder Deol (deolr@wustl.edu)
Dr. Edwin Carlen (carlen@wustl.edu)

The PDMS Solvent Hood in room L27 is only used to process PDMS samples. Dessicators are available.

SOP

IMSE contact

For additional information about the PDMS solvent hood or to request training, please contact IMSE cleanroom staff.

Dr. Rajinder Deol (deolr@wustl.edu)
Dr. Edwin Carlen (carlen@wustl.edu)